The existing tool is already equipped with both single and multi source sputter technology giving maximum flexibility for SAL’s focus on new process developments. The latest upgrade now marks an important milestone for SAL as it integrates an additional PEALD process module. High density microwave plasma source technology utilised in this latest ALD technology allows low temperature processing and avoids unwanted ion bombardment when working with damage sensitive substrates and materials.
Mohssen Moridi, Senior Executive Director at SAL, commented “The new tool configuration gives us unique opportunities to develop process flows working with both ALD and PVD steps on a single platform without intermediate vacuum break. For the work we are doing in areas like RF, the ability to manage damage sensitive materials will also open up new possible processes”.
Ralf Eichert, Managing Director Evatec Europe, commented “ SAL’s Villach facility is already well established as a leading research center across areas including MEMS and Advanced Packaging. We are excited to support them as they expand their capabilities as a center for industrial R&D and small series prototyping even further.
About SAL
Silicon Austria Labs propels ideas into innovation in the fields of microsystems, sensor systems, intelligent wireless systems, power electronics and embedded systems with a consistent research excellence and economic impact. For more information visit https://silicon-austria-labs.com/.
For press enquiries please contact Isabella Preuer. Isabella.Preuer@silicon-austria.com
About Evatec
As a global leader in thin film technology Evatec designs and manufactures production systems for industry across applications in Advanced Packaging, Semiconductor, Optoelectronics and Photonics, whilst it’s customized engineering solutions support the equipment needed at the worlds' leading R&D institutions. For more information visit https://evatecnet.com.
For press enquiries please contact Allan Jaunzens. allan.jaunzens@evatecnet.com
