Infrastructure
Excellent research requires excellent facilities. In the SAL laboratories a wide range of high-tech instruments is available for SAL staff, partner organisations and customers to achieve the best research results.
HF Vapor, SPTS
Ion Beam Etching, Veeco
Direct Laser Lithography
Double-beam laser interferometry – aixACCT aixDBLI with TF2000
Stress measurement – Toho FLX-2320
Resistivity Mapping – Filmetrics R50
Spectroscopic Ellipsometry – Semilab SE-2000IR
Panalytical MRD XL
Jivelec Jetfirst 200C
Oxford Instruments PlasmaPro 100
Testbench for magnetic position systems
DAGE Optima+ Shear/Pull tester
EVG I20 Infrared Inspection
Manual wirebonders for thin wire and thick wire
Häcker Ourplant D1
Finetec Lambda, Sigma
Waferbonder EVG 520
Highest Frequency Signal Generators and Network Analyzers
Spectrum Analyzer
mmW and DC Probes
Network Analyzer and Signal Generators
Precision DC Supplies, Multimeters and Function Generators
300mm Wafer Prober
Fast in-house PCB Prototyping (vapor phase solder, semi-manual SMT assembly and rework station)
Curve Tracer
3D Profilometer and Microscopic measurement systems for power electronic systems
Test fixtures for component and magnetic material characterization
Probes: current probes, differential probes, active probes, optical isolated probes
High power loads
EMI Receiver
RF Signal Generator (IQ Modulation, WLAN signals, etc.)
High Power Amplifier
GTEM cell and crawford TEM cell
Rohde & Schwarz RTP Time Domain Reflectometry Oscilloscope 16 GHz 40 Gsa/s
Keysight Impedance Analyzer E4990A 20Hz - 120MHz
Keysight Impedance Analyzer E4991B 1MHz - 3GHz
Vector Network Analyzer
Precision Sourcemeters
Grid simulator
Precision DC supplies
Schwingprüfanlage TIRA TV 51110
Weiss Umwelttechnik ShakeEvent C/600/70/15/V
Photonic assembly station, Ficontec
Photonic Probe station, Formfactor
Profilometer, Keisleigh
Microsystem analyzer, Polytec, MSA-500
High power laser for material processing, Lightconversion, Pharos
Digital holographic microscope, LynceeTec, DHM
Fs-Laser system for non-linear spectroscopy
Raman microscope, Renishaw inViaTM Qontor
Ultrasonic Spray Coater ND-SP, Nadetech Innovations
Die coater with flexographic and bar coating unit, InfinityPV RLC 3DPrint Slot
Semi-Automatic Universal Screen Printing Machine SCF300DE, Eickmeyer GmbH
Laser cutter platform, PLS150D, Universal Laser Systems
Photonic curing system PulseForge 1200, Novacentrix
Inkjet printer Pixdro LP50, Süss MicroTec
Force test bench, Zwick|Roell
Nanoindenter
Plasma Asher
Thin film Deposition (UNIVEX 900)
Wet bench
Resist Track system (RCD8 + HP8)
Direct Writing Laser (DWL66+)
ThermoFisher Helios G4 SEM-FIB
Mikroskop Leica DM8000 M
Sinton Instruments Charge Carrier Lifetime Measurement WCT-120
CTR Solar-cell I-V Measurement
Sinton Instruments Cell Flash Tester FCT-350
EMSCAN Electromagnetic Scanner EMxpert EHX-43
MBraun Glovebox MB20/MB200
Nabertherm Chamber Oven HTCT 03/16
Nabatherm Tube Oven R80
Alphalaser Laser Welding System ALP 35S
MBR electronics, Ultrasonic Solder System USS-9210 Weller, WHP 1000 Hotplate
Musashi Digital Dispenser ML5000XII
Schmidt Instruments Gap Welding System UIP1000 with USK200
Nordson-Dage Die-Bond Tester 4000 optima plus
Finetech Die Bonder Fineplacer Lambda
Kulicke & Soffa Manual Wire Bonder K&S 4526
Süss MicroTec Wafer Prober PM8
Vötsch Climatic Chamber VC3 4018
Ophir Laser Power Meter / Energy Meter NOVA II
Cinogy Laser- Beam Profiling Camera CinCam CMOS-1.001-Nano
Zomega Terahertz Imaging System Z3 inkl. FS Laser
CTR SAW crystal (pressure) measurement
Infratec Thermal Imaging Camera Head-650
Redlake High-Speed Camera Motion Scope M3
Andor NIR Camera iXon 885
Leica Stereo Inspection Microscope S6-D
Zeiss Fluorescence Light Microscope AXIO Imager M1m
Leica Microscope DMLM + Jenoptik ProgRes SpeedXT 5
Bruker Stylus Profilometer Dektak XT-A Surface Profiler
Polytec Micro System Analyser MSA-500-TPM
Bruker FT-IR Microscope LUMOS
UV-VIS spectrometer, Agilent Cary60
Nicolet FTIR / NTNIR Spectrometer Nexus 870
Renishaw Raman Spectrometer inVia Reflex
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