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MUSIC

MUSIC aims at developing materials, process integration technology, and methodologies to utilize new materials like AlScN that can replace lead-based materials in piezoelectric devices.

Project goals

  • Development of the sputtering technology to deposit high quality AlSc30-36%N multilayers
  • Development of polymer transfer technology, to integrate piezoMEMS devices with polymers for performance
  • Development of testing and characterization methodologies
  • Design and characterization of MEMS microspeaker test vehicles to test the technology and assess the feasibility of the multilayer lead-free approach
  • Development of process industrialization methodologies, to scale up the processes towards mass manufacturing

The project integrates multiple partners, from material providers to semiconductor tool vendors, fabless design company, to mass manufacturing foundry and integrated device manufacturer.

Project Consortium

Project
facts

Title: AlSc30-36%N Multilayers for Next-Generation PiezoMEMS Micro-Speakers
Program: SAL Cooperative Research
Project Coordinator: Silicon Austria Labs GmbH (SAL)
Duration: 2 years (2023–2025)

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Contact

Business Development
Lisa Kainz MA
Business Development Microsystems
Graz
+43 664 88 964 965
lisa.kainz@silicon-austria.com
Project Manager
Dr. Humberto Campanella Pineda
Head of Piezoelectric Microsystem Technologies (PMT) Research Unit
Villach
+43 664 78 067 335
humberto.campanella@silicon-austria.com

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