6G R&D FAB
- With project 6G R&D FAB, SAL will enable a platform for the development of RF components for the future of Connectivity applications. This comes with the scope of the More-than-Moore paradigm, than pushes the world of Silicon-based devices beyond its usual limits.
- The platform offers the unique combination of advanced tools for the processing of RF components (patterning and dry etching equipment), and for their inspection and characterization (automated optical inspection tool, automated RF prober).
- Associated to other processing equipment, the UV mask aligner and the dry etching cluster tool with open the doors of innovative designs of RF components (state-of-the-art structuration of thin-film stacks for high-performance RF filters).
- The characterization and inspection platform will enable cutting-edge process control for higher yield performance in the frame of advanced R&D and small-production series.
Your contact person
Dr. Jérémy Streque
Senior Scientist | Piezoelectric Microsystem Technologies
e-mail: contact@silicon-austria.com
Research program
This project is co-financed by the European Regional Development Fund. For more information on IWB/EFRE, visit www.efre.gv.at.
