Research Services:

• Metal, oxide, and nitride thin film sputtering from 5 modules
• (Pulsed) DC, RF, reactive/non-reactive, and co-sputtering capabilities
• Co-sputtering from up-to 4 targets in multisource module
• In-vacuo transport of wafers between modules and pre-treatment units
• Automated processing of 25 wafer batch
• Material examples: Pt, Ti, TiO2, SiO2 Mo, Al, W, AlN, AlScN, and many more on request

Expertise:

Magnetron sputtering – Evatec Clusterline 200E:

• 2 multisource modules for oxides/nitrides (+ HiPIMS generator), PZT module, single target nitride module with hot chuck, soft etch module, PEALD (2023)