Sputter Cluster
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SAL Villach
Sputter Cluster
Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.
![Sputter Cluster Evatec Clusterline 200E](/fileadmin/_processed_/5/2/csm_Sputter_Cluster_Evatec_Clusterline_200E_6303c24276.jpg)
Research Services:
- Metal, oxide, and nitride thin film sputtering from 5 modules
- (Pulsed) DC, RF, reactive/non-reactive, and co-sputtering capabilities
- Co-sputtering from up-to 4 targets in multisource module
- In-vacuo transport of wafers between modules and pre-treatment units
- Automated processing of 25 wafer batch
- Material examples: Pt, Ti, TiO2, SiO2 Mo, Al, W, AlN, AlScN, and many more on request
Expertise:
Magnetron sputtering – Evatec Clusterline 200E:
- 2 multisource modules for oxides/nitrides (+ HiPIMS generator), PZT module, single target nitride module with hot chuck, soft etch module, PEALD (2023)
Contact
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