MM-SENS & ACT

• Design of magnetic micromirror and its components: micromagnets, micro coils, reflective area, torsion bars etc. via FEM and analytical calculations
• Design of integrated magnetoresistive sensors system via FEM and micromagnetic simulations
• Optimization of the device for specific target requirements (field of view, device dimensions, max voltage/power losses etc.)
• Microfabrication and characterization of the components of the magnetic micromirror: permanent micromagnets, micro coils and magnetoresistive sensors
• Fabrication of the micromirrors
• Testing of the micromirrors in different environmental conditions like humidity and temperature

For the targeted applications within MM-Sens & Act, a micromirror was achieved that combines a large field of view of ±30° with comparatively large mirror sizes of up to 5×5 mm², while maintaining compact device dimensions of around 9×9 mm². This performance is complemented by low power consumption below 400 mW and operation at frequencies below 100 Hz, enabling efficient and scalable system integration.

After optimization for the target use cases, the micromirror can be fully microfabricated on 200 mm wafers, with a monolithically integrated magnetic sensor enabling closed-loop control.