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AURORA

In collaboration with TDK Electronics, Silicon Austria Labs (SAL) developed next generation 2D micromirrors for AR/VR applications focused on large field of view, low power consumption and compact form factor. These devices were prototyped via SAL’s 200mm PiezoMEMS technology platform.

Project goals

  • Development of new concepts for designing efficient MEMS devices tailored to AR/VR applications
  • Development of thin film technological modules highlighted by high-quality piezoelectric thin films
  • Establishment and optimization of PiezoMOEMS microfabrication technological platform
  • Custom characterization setup and techniques tailored to PiezoMOEMS devices

An established design, technology and characterization platform was built and validated through multiple generations of PiezoMOEMS that have been successfully developed, built, and tested.

Project Consortium

Project
facts

Title: Augmented Reality with Optical MEMS Micromirrors
Program: SAL Cooperative Research (SCR)
Duration: July 2021 – July 2025

Similar Projects

Discover more projects with similar focuses and technologies.

MIRAC

Within the scope of the „MIRAC“ project, sensor algorithms and microfabrication processes are being developed for a spectrometer based on a Fabry-Pérot interferometer, utilizing Piezo-MEMS and Metasurfaces, thereby creating a foundation for future applications in consumer products….

ISOLDE

The ISOLDE project aims to expand, further develop, and industrialize the European RISC-V ecosystem. RISC-V is an instruction set architecture based on the design principle of Reduced Instruction Set Computer (RISC). The project aims to leverage the open-source community to enhance the security of the RISC-V architecture and make the system more robust against attackers...

FAMES

The FAMES pilot line is a cooperative initiative under the European Chips Act to develop advanced 10 nm and 7 nm FD-SOI technologies for innovative semiconductor applications. It brings together European partners to foster a freely accessible manufacturing ecosystem. Within the project, SAL is developing self-biased magnetic circulators intended for integration into the 22 nm FDX FD-SOI technology provided by CEA-LETI….
All Projects

Contact

Business Development
Lisa Kainz MA
Business Development Microsystems
Graz
+43 664 88 964 965
lisa.kainz@silicon-austria.com
Project Manager
Dr. Anton Lagosh
Senior Scientist, Piezoelectric Microsystem Technologies
Villach
+43 664 78 243 434
anton.lagosh@silicon-austria.com

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