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AURORA

In collaboration with TDK Electronics, Silicon Austria Labs (SAL) developed next generation 2D micromirrors for AR/VR applications focused on large field of view, low power consumption and compact form factor. These devices were prototyped via SAL’s 200mm PiezoMEMS technology platform.

Project goals

  • Development of new concepts for designing efficient MEMS devices tailored to AR/VR applications
  • Development of thin film technological modules highlighted by high-quality piezoelectric thin films
  • Establishment and optimization of PiezoMOEMS microfabrication technological platform
  • Custom characterization setup and techniques tailored to PiezoMOEMS devices

An established design, technology and characterization platform was built and validated through multiple generations of PiezoMOEMS that have been successfully developed, built, and tested.

Project Consortium

Project
facts

Title: Augmented Reality with Optical MEMS Micromirrors
Program: SAL Cooperative Research (SCR)
Duration: July 2021 – July 2025

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Contact

Business Development
Lisa Kainz MA
Business Development Microsystems
Graz
+43 664 88 964 965
lisa.kainz@silicon-austria.com
Project Manager
Dr. Anton Lagosh
Senior Scientist, Piezoelectric Microsystem Technologies
Villach
+43 664 78 243 434
anton.lagosh@silicon-austria.com

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