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About SAL

Magnetic Microsystem Technologies

Research Focus Areas

We develop magnetic microsystems and technologies for sensing, actuation, RF, and emerging spintronic and quantum applications.

Our unit covers the full development chain from modeling and design to materials and thin-film development, micro- and nanofabrication, integration, and characterization.

We work across key technology areas including magnetic materials, magnetoresistive sensor technologies, magnetically actuated MEMS, micromagnetic components, spintronic concepts, and magnetic RF and microwave devices.

By combining expertise in magnetics, microsystems engineering, and thin-film technologies within our cleanroom environment, we develop and validate functional demonstrators for industrial and emerging applications.

Research Expertise

We cover the full development chain of magnetic microsystems from simulation and design to fabrication and system-level characterization.

 

Design & Simulation

  • Micro- and macro-magnetic field simulation and multi-domain simulation (e.g. Magpylib, in-house developed)
  • System design and optimization
  • Custom numerical methods (FE, FD, MOM, BEM)
  • ML and AI-based algorithms
  • Micromagnet design

 

Fabrication

  • Micromagnet fabrication center
  • Lithography (mask aligner, laser, e-beam)
  • Magnetic thin-film deposition (magnetron sputtering, evaporation)
  • Wet and dry etching (RIE, ion-beam etching)

 

Characterization & Testing

  • Precision testing of magnetic sensors, pole wheels and microsystem testing
  • Thin Film characterization
  • Cleanroom metrology (SEM, EDX, XRD, AFM, MFM)
  • Magnetic measurement setups (VSM, Helmholtz coils, electromagnets, custom setups)

Uses

Magnetic Position and Orientation Systems for sensing, motion control, and power monitoring

Magnetic MEMS for actuation, sensing, micromotors, and energy harvesting

Spintronic Applications for sensing, bio-detection, and advanced magnetic devices

RF Components for telecom, radar, sensing, and tunable microwave systems

Projects

Indspeed

The INDSPEED project is developing a new ultra-precise magnetic encoder system based on TMR sensors and SmCo pole wheels.

Mag-MEMS

The „Mag-MEMS“ project aims to develop a miniaturized 3D tactile sensor as a proof-of-concept demonstrator that can detect shear and normal forces with high spatial resolution and a large dynamic range. This will be achieved by integrating tailored arrays of anisotropic magnetoresistive (AMR) sensors, which allow for tracking the three-dimensional motion of a permanent micro-magnet embedded in a flexible frame in the sub-millimeter range….

Mag-speak

The objective of the „Mag-Speak“ project was to develop, manufacture, and test a new generation of MEMS woofer micro-speakers based on magnetic drive principles. A proof-of-concept micro-speaker was sought, offering a significantly more compact design compared to current state-of-the-art systems, while simultaneously achieving sound pressure levels and total harmonic distortion values that meet market requirements for woofers.
All projects

Contact

Business Development
Lisa Kainz MA
Business Development Microsystems
Graz
+43 664 88 964 965
lisa.kainz@silicon-austria.com
Head of Research Unit
Dr. Michael Ortner
Head of Research Unit Magnetic Microsystem Technologies
Villach
+43 664 88 200 148
michael.ortner@silicon-austria.com

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