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Mag-MEMS

The project “Mag-MEMS” aims to realize a miniaturized 3D tactile sensor proof-of-concept demonstrator capable of detecting shear and normal forces with high spatial resolution and a large sensitivity range. This is achieved through the integration of custom arrays of anisotropic magnetoresistive (AMR) sensors, enabling the tracking of the 3D spatial movement of a sub-millimeter permanent micromagnet embedded in a flexible frame.

Project goals

  • Devising concepts and approaches for sub-mm micromagnet motion tracking in 3D using planar 2D magnetic (magnetoresistive) field sensors
  • Design of AMR sensor arrays tailored to the requirements of a 3D magnetic tactile sensor via a combination of micromagnetic, analytical and finite-element simulations
  • Deposition and Patterning of Magnetic thin films for AMR sensor microfabrication
  • Characterization and testing of AMR sensor arrays in laboratory environment

Ongoing work is devoted to the integration of AMR sensors and sub-mm permanent micromagnet into a proof-of-concept magnetic tactile sensor demonstrator.

Project Consortium

Project
facts

Title: Magnetic 3D tactile sensor (Mag-MEMS)
Program: SAL Strategic Research (SSR)
Publications:

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Contact

Business Development
Lisa Kainz MA
Business Development Microsystems
Graz
+43 664 88 964 965
lisa.kainz@silicon-austria.com
Project Manager
Dr. Stefano Lumetti
Senior Scientist, Magnetic Microsystem Technologies
Villach
+43 664 88 200 136
stefano.lumetti@silicon-austria.com

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