MM-Sens & Act

The project MM – Sens & Act is developing an innovative micromirror based on magnetic and piezo electric actuations with fully integrated sensor for closed-loop control. The device will feature large mechanical angular displacement and large mirror size, as well as closed-loop control, low voltage and compact dimensions.

Within the project, the following objectives are being pursued:

Design of magnetic micromirrors and integrated magnetic sensors
Fabrication and characterization of the micromagnets, micro coils and magnetic sensors
Fabrication of the micromirrors
Testing of the micromirrors in different environmental conditions

Project facts

Title: Magnetic and hybrid micromirror with integrated magnetic sensor
Program: "Microsystems Advanced Research Program", Strategische Finanzierung von SAL
Project lead: Perla Malagò

Your contact person

Dr. Perla Malagò

Senior Scientist

e-mail: perla.malago@silicon-austria.com

Research program

This project is financed by the SAL strategic funding scheme, named Microsystems Advanced Research Program.

It is an internal funding program aiming at performing cutting-edge and innovative research at SAL by developing microsystems demonstrators based on new technologies and bring them to the industry level of interest.