Mag-MEMS

The Mag-MEMS project aims to develop and manufacture a magnetic 3D touch sensor based on suitably designed arrays of magnetoresistive sensors.

The project “Mag-MEMS” aims at realizing a 3D tactile sensor proof-of-concept demonstrator integrating custom planar arrays of anisotropic magnetoresistive (AMR) sensors.

The following R&D activities are performed in the framework of the project:

Design of magnetoresistive sensors via micromagnetic simulations
Deposition and patterning of magnetic thin films for AMR sensor fabrication
Characterization and testing of AMR sensor devices
Integration of AMR sensors into microsystems

Project facts

Title: Magnetic 3D tactile sensor
Program: SAL Strategic Research (SSR)

Your contact person

Stefano Lumetti, PhD

Senior Scientist

e-mail: stefano.lumetti@silicon-austria.com

Research program

“Mag-MEMS” is a SAL Strategic Research (SSR) project focused on the “Magnetic microsystems” and “Magnetoresistive sensors” research topics of the “More-Than-Moore” SAL Lighthouse.