Magnetic Microsystem Technologies

Research focus areas

• Design, Microfabrication, and Testing: Development of magnetic microsystems — including sensors, micromagnets, and MEMS — up to prototype and demonstrator level.
• Industrial Magnetic Systems: Design, construction, and testing of magnetic systems for industrial and automotive position and orientation applications, from concept to demonstrator.
• Magnetic Simulation and System Optimization: Multi-scale magnetic simulations using industrial (ANSYS, COMSOL) and state-of-the-art research tools (MuMax, OOMMF, Magpylib, MagNumFE), along with custom numerical solutions (FE, FD, MOM, BEM).
• Magnetic Material Deposition and Characterization: Thin film deposition and material characterization in ISO 4/5 cleanroom environments for the development of advanced magnetic microsystems.

Research competencies

Our group brings extensive expertise in magnetic simulations and modeling of magnetic sensor systems and magnetic materials both at the macroscopic and micromagnetic scale. We specialize in component and system-level optimization tailored to customer needs.

The team developed Magpylib, an open-source magnetic field simulation tool based on analytical solutions. For magnetic position system design, it significantly outperforms conventional commercial simulation environments in speed and accuracy.

Our microfabrication capabilities, located within the SAL MicroFab, include:

• Lithography (mask aligner, laser lithography, electron-beam lithography)
• Thin film deposition (magnetron sputtering, electron-beam evaporation)
• Wet and dry etching (ion-beam etching, reactive-ion etching)

For characterization, we utilize:

• Cleanroom metrology tools (SEM, EDX, XRD, profilometry)
• Specialized magnetic measurement equipment (vibrating sample magnetometer, Helmholtz coils, electromagnets, and custom test setups).

We also bring extensive experience in industrial and automotive system development, from magnetic position/orientation systems to current monitoring and power applications — covering the full path from initial design to prototype realization.

Applications

• Magnetic Position Systems: Linear position sensors, multi-axis joysticks, rotary encoders, and custom magnetic sensing solutions for consumer, industrial, and automotive sectors.
• Magnetoresistive and Hall Sensors: Applications include current sensing, current limiting, tactile sensing, flow sensing, and closed-loop MEMS actuation control.
• Magnetic MEMS: Microsystems with integrated micromagnets for use in micro-speakers, micromirrors, micropumps, and more.
• Open-Source Simulation Tools: Ongoing development of Magpylib, enabling fast, flexible magnetic field simulations for researchers and industry.