The project “Surf’s Up” is committed to the development of a new generation of radio-frequency filters and resonators based on a new technology of layer transfer and epitaxial nitride films fabricated by magnetron sputtering.
Project goals
This project aims to:
Innovate the current technology of RF filters based on bulk acoustic waves in piezoelectric materials (e.g. AlScN)
Investigate the relations between all the components of the film stack such as electrode layers and acoustic mirror
Develop epitaxial Al0.7Sc0.3N on commercially available substrates in an industrial scale via magnetron sputtering
Develop a new microfabrication process including the layer transfer of an epitaxial Al0.7Sc0.3N thin film for high-quality resonator structures
Demonstrate the performance of Al0.7Sc0.3N and interdigitated transducer (IDT) structures for opto-acoustic applications
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