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Surf's Up

The project “Surf’s Up” is committed to the development of a new generation of radio-frequency filters and resonators based on a new technology of layer transfer and epitaxial nitride films fabricated by magnetron sputtering.

Project goals

This project aims to:

Innovate the current technology of RF filters based on bulk acoustic waves in piezoelectric materials (e.g. AlScN)
Investigate the relations between all the components of the film stack such as electrode layers and acoustic mirror
Develop epitaxial Al0.7Sc0.3N on commercially available substrates in an industrial scale via magnetron sputtering
Develop a new microfabrication process including the layer transfer of an epitaxial Al0.7Sc0.3N thin film for high-quality resonator structures
Demonstrate the performance of Al0.7Sc0.3N and interdigitated transducer (IDT) structures for opto-acoustic applications

Project Consortium

Qualcomm Austria GmbH

Silicon Austria Labs GmbH

Project
facts

Title: Surf's Up
Program: Chip2Sys
Project Coordinator: Silicon Austria Labs GmbH
Project duration: July 2023 – June 2027

This project supports the following UN Sustainability Goals

11

SUSTAINABLE CITIES AND COMMUNITIES

11

SUSTAINABLE CITIES AND COMMUNITIES

12

RESPONSIBLE CONSUMPTION AND PRODUCTION

12

RESPONSIBLE CONSUMPTION AND PRODUCTION

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Contact

Business Development

Lisa Kainz MA

Business Development Microsystems

Graz

+43 664 88 964 965

lisa.kainz@silicon-austria.com

Project Manager

Dr. Dmytro Solonenko

Senior Scientist, Thin Film Technologies

Villach

+43 664 88 843 727

dmytro.solonenko@silicon-austria.com