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Surf's Up

The project “Surf’s Up” is committed to the development of a new generation of radio-frequency filters and resonators based on a new technology of layer transfer and epitaxial nitride films fabricated by magnetron sputtering.

Project goals

This project aims to:

  • Innovate the current technology of RF filters based on bulk acoustic waves in piezoelectric materials (e.g. AlScN)
  • Investigate the relations between all the components of the film stack such as electrode layers and acoustic mirror
  • Develop epitaxial Al0.7Sc0.3N on commercially available substrates in an industrial scale via magnetron sputtering
  • Develop a new microfabrication process including the layer transfer of an epitaxial Al0.7Sc0.3N thin film for high-quality resonator structures
  • Demonstrate the performance of Al0.7Sc0.3N and interdigitated transducer (IDT) structures for opto-acoustic applications

Project Consortium

Project
facts

Title: Surf's Up
Program: Chip2Sys
Project Coordinator: Silicon Austria Labs GmbH
Project duration: July 2023 – June 2027

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Contact

Business Development
Lisa Kainz MA
Business Development Microsystems
Graz
+43 664 88 964 965
lisa.kainz@silicon-austria.com
Project Manager
Dr. Dmytro Solonenko
Senior Scientist, Thin Film Technologies
Villach
+43 664 88 843 727
dmytro.solonenko@silicon-austria.com

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