Pushing the Boun­da­ries of Thin-Film Depo­si­tion: Silicon Austria Labs expands Stra­tegic Part­nership with Evatec

Silicon Austria Labs (SAL) has expanded its advanced thin-film process­ing capa­bi­li­ties with the instal­la­tion of a second Evatec CLUS­TER­LINE® 200 thin-film cluster tool at its Villach faci­lity. The new tool has been made possible through joint Euro­pean funding with parti­cular focus on deve­lo­ping leading new indus­trial depo­si­tion processes and film proper­ties for the high-perfor­mance metal and nitride films essen­tial for emer­ging appli­ca­tions in Wire­less, Power and MEMS.

The new system provides advanced etch, sputter, and high-tempe­ra­ture process­ing capa­bi­li­ties and inte­grates Evatec’s custom HiPIMS source tech­no­logy. This enables SAL to inves­ti­gate high-energy plasma processes and their impact on critical film charac­te­ris­tics such as density, stress control, and unifor­mity.

Ralf Eichert, Mana­ging Director Evatec Europe, commented “SAL’s Villach faci­lity is already well esta­blished as a leading re­search centre across areas inclu­ding MEMS and Advanced Packa­ging. Capa­bi­li­ties now avail­able through the new tool comple­ment their exis­ting CLUS­TER­LINE® 200 equipped with both single- and multi-source sputter tech­no­logy and low tempe­ra­ture PEALD capa­bi­lity, making SAL a perfect deve­lop­ment partner for industry.

Mohssen Moridi, Senior Execu­tive Director at SAL confirmed that the invest­ment further streng­thened SAL’s role as a Euro­pean inno­va­tion hub for advanced mate­rials and micro­sys­tems tech­no­lo­gies. The close colla­bo­ra­tion between Evatec and SAL has been rein­forced even further with the recent signing of a joint “Memo­randum of Under­stan­ding” between our two compa­nies. Evatec’s CLUS­TER­LINE® plat­form provides a powerful foun­da­tion for deve­lo­ping next-gene­ra­tion thin-film processes and supporting indus­trial part­ners in acce­le­ra­ting tech­no­logy deve­lop­ment and market adop­tion”.

About SAL

Silicon Austria Labs propels ideas into inno­va­tion in the fields of micro­sys­tems, sensor systems, intel­li­gent wire­less systems, power elec­tro­nics and embedded systems with a consis­tent re­search excel­lence and economic impact. 

About Evatec

As a global leader in thin film tech­no­logy Evatec designs and manu­fac­tures produc­tion systems for industry across appli­ca­tions in Advanced Packa­ging, Semi­con­ductor, Opto­elec­tro­nics and Photo­nics, whilst it’s cust­o­mized engi­nee­ring solu­tions support the equip­ment needed at the worlds‘ leading R&D insti­tu­tions. For more infor­ma­tion visit https://​evatecnet.com. For press enqui­ries please contact Allan Jaun­zens. allan.jaun­zens@evatecnet.com

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