Optical Characterization of a resonant Piezo Mems Micromirror

Master Thesis

In the network of science and industry, Silicon Austria Labs (SAL) offers re­search in four pionee­ring divi­sions: Sensor Systems, RF Systems, Power Elec­tro­nics and System Inte­gra­tion. SAL – a great place to re­search. 


In our previous work, we have designed and fabricated novel resonant piezo actuated silicon-based MEMS mirror with the highest optical scan angle reported. The mirror is especially suitable for applications such as pico-projectors, LIDAR, scanning imaging systems such as µ-OCT as well as other optical applications. Current efforts are focused on design revision and optimization of the transduction system. For this, careful characterization of mirror performance is required. The characterization is confronted with large scan angles and high-frequencies involved, which is the reason for limited use of the state-of-the art equipment such as laser-doppler vibrometry otherwise available at the research center. A dedicated optical bench for measuring dynamic mirror deformation and frequency response of the mirror is required to study the transduction mechanisms and optimize the excitation schemes. Based on these results, the next generation mirrors for 2-axis scanning and improved performances will be proposed.


An important part of the Master´s Thesis will be dedicated to the design and implementation of an optical test bench to characterize existing and newly fabricated mirror prototypes. The system should support time-resolved measurement of the mirror deformation and more precisely measurement of the mirror warping, measurement of the amplitude and phase of the mirror response. In general, we should be capable of measuring the mirror deformations down to Lambda/10 accuracy and measuring frequency response up to 150 kHz. Based on his/her characterization results and their interpretations, the student will support the design of the next generation of micromirrors with 2D scanning capabilities. In addition, she/he will support optimization and investigation of the piezo material and its fabrication technology (PVD, CSD), possibly the developments toward the final LIDAR applications and its potential technology transfer to industrial partners.

About us

Silicon Austria Labs (SAL) is on the way to become a top Euro­pean re­search center for elec­tronic based systems. In the network of science and industry, we carry out re­search at the highest global re­search level and thus create the basis for new types of prod­ucts and processes.  SAL is divided into four divi­sions: Sensor Systems, RF Systems, Power Elec­tro­nics and System Inte­gra­tion, and is equipped by state-of the art equipment, consisting of comprehensive optical labs, C5/C8 cleanroom facilities, backend processes for micro-packaging, as well as custom prototyping facilities (custom electronic development, 3d printers, CNC-machinery, Inkjet printer).


Start Date / Duration / Contract

Start date (planned): as soon as possible;
Duration (planned): 6 Months
Payment: 1385€ gross (38.5 Hours/Week)
Place: Villach, Austria.


Profile / requirements

  • Master Student in Applied Optics, Instrumentation and Measurements, Micro-Nanotechnologies or similar.
  • Programming skills (ex: LabView or Python)
  • Skills in optics, optical instrumentation as well as cleanroom experience are highly desirable.
  • Ability to tackle and solve practical problems; Teamwork skills