MICROFABRICATION
SEM / FIB Microscope
- Manufacturer: Thermo Fisher
- Model: Helios G4 UC

General Description:
The Helios G4 is a combined electron / focused ion beam microscope for topography and morphology analysis of micro- and nanostructures as well as the structuring of thereof. The system is equipped with a Bruker EDX detector, which allows to determine the composition of chemical elements in a sample.
Key Specifications:
- Up to 200 mm wafers
- High resolution SEM imaging
- Electron column and Ion column (Ga-Ions) up to 30 kV
- Ion beam patterning
- Gas injection system for Pt deposition and insulator enhanced etch (XeF2)
- SE detectors: ETD, TLD
- BSE detectors: TLD, MD, ICD, ABS, CBS
- EDX detector
- Software: XT microscope, Maps plugin, Nanobuilder plugin
Availability | Use allowed for all researchers with permission |
Location | Cleanroom C8 |
Responsibles / Contact | Dr. Sarah Risquez / Dr. Ali Roshanghias |