SEM / FIB Microscope

General Description:

The Helios G4 is a combined electron / focused ion beam microscope for topography and morphology analysis of micro- and nanostructures as well as the structuring of thereof. The system is equipped with a Bruker EDX detector, which allows to determine the composition of chemical elements in a sample.

Key Specifications:

• Up to 200 mm wafers
• High resolution SEM imaging
• Electron column and Ion column (Ga-Ions) up to 30 kV
• Ion beam patterning
• Gas injection system for Pt deposition and insulator enhanced etch (XeF2)
• SE detectors: ETD, TLD
• BSE detectors: TLD, MD, ICD, ABS, CBS
• EDX detector
• Software: XT microscope, Maps plugin, Nanobuilder plugin