MICROFABRICATION

Optical Microscope

  • Microscope: Leica DM8000 M
  • Camera: Leica DMC4500

General Description:

The Leica DM8000 M is a multi-purpose R&D microscope for flexible sample investigation, visualization and documentation. An outstanding feature is that three different imaging modes (bright-field, dark-field and DIC) are integrated in one instrument, allowing a comprehensive characterization of a wide range of samples. Furthermore, the microscope features a tilted illumination mode. The instrument is located in a cleanroom environment (C5) and is equipped for wafer-level characterization up to 8 inch.

 

Key Specifications:

  • Objectives (5x, 10x, 20x, 50x, 100x)
  • Special Macro Objective (0.7x)
  • Transmission and reflection measurements possible
  • Imaging Modes: Bright-field, dark-field, differential interference contrast (only reflection), tilted illumination
  • Manual stage with three inserts (glass, metal and a rotatable wafer holder)
  • Glass yellow filter 480 nm for reduction of the UV portion in the illumination
  • Camera: 2/3” CCD sensor with 5MP resolution
  • Camera software: Leica LAS X Software with stitching option and LAS Live Z Builder module

Availability

Use allowed for all researchers with permission

Location

Cleanroom C5
Europastraße 12
9524 Villach

Responsibles / Contact

Dr. Adrien Piot / Dr. Sarah Risquez
Tel.:+43 4242 56300 264
Tel.:+43 4242 56300 275