{"id":6703,"date":"2026-06-11T09:43:44","date_gmt":"2026-06-11T07:43:44","guid":{"rendered":"https:\/\/silicon-austria-labs.com\/?p=6703"},"modified":"2026-07-30T09:37:39","modified_gmt":"2026-07-30T07:37:39","slug":"pushing-the-boundaries-of-thin-film-deposition-silicon-austria-labs-expands-strategic-partnership-with-evatec","status":"publish","type":"post","link":"https:\/\/silicon-austria-labs.com\/en\/pushing-the-boundaries-of-thin-film-deposition-silicon-austria-labs-expands-strategic-partnership-with-evatec\/","title":{"rendered":"Pushing the Boun\u00adda\u00adries of Thin-Film Depo\u00adsi\u00adtion: Silicon Austria Labs expands Stra\u00adtegic Part\u00adnership with Evatec"},"content":{"rendered":"

Silicon Austria Labs (SAL) has expanded its advanced thin-film process\u00ading capa\u00adbi\u00adli\u00adties with the instal\u00adla\u00adtion of a second Evatec CLUS\u00adTER\u00adLINE\u00ae 200 thin-film cluster tool at its Villach faci\u00adlity. The new tool has been made possible through joint Euro\u00adpean funding with parti\u00adcular focus on deve\u00adlo\u00adping leading new indus\u00adtrial depo\u00adsi\u00adtion processes and film proper\u00adties for the high-perfor\u00admance metal and nitride films essen\u00adtial for emer\u00adging appli\u00adca\u00adtions in Wire\u00adless, Power and MEMS.<\/strong><\/p>\n

The new system provides advanced etch, sputter, and high-tempe\u00adra\u00adture process\u00ading capa\u00adbi\u00adli\u00adties and inte\u00adgrates Evatec\u2019s custom HiPIMS source tech\u00adno\u00adlogy. This enables SAL to inves\u00adti\u00adgate high-energy plasma processes and their impact on critical film charac\u00adte\u00adris\u00adtics such as density, stress control, and unifor\u00admity.<\/p>\n

Ralf Eichert, Mana\u00adging Director Evatec Europe<\/strong>, commented \u201cSAL\u2019s Villach faci\u00adlity is already well esta\u00adblished as a leading re\u00adsearch centre across areas inclu\u00adding MEMS and Advanced Packa\u00adging. Capa\u00adbi\u00adli\u00adties now avail\u00adable through the new tool comple\u00adment their exis\u00adting CLUS\u00adTER\u00adLINE\u00ae 200 equipped with both single- and multi-source sputter tech\u00adno\u00adlogy and low tempe\u00adra\u00adture PEALD capa\u00adbi\u00adlity, making SAL a perfect deve\u00adlop\u00adment partner for industry.<\/p>\n

Mohssen Moridi, Senior Execu\u00adtive Director at SAL<\/strong> confirmed that the invest\u00adment further streng\u00adthened SAL\u2019s role as a Euro\u00adpean inno\u00adva\u00adtion hub for advanced mate\u00adrials and micro\u00adsys\u00adtems tech\u00adno\u00adlo\u00adgies. The close colla\u00adbo\u00adra\u00adtion between Evatec and SAL has been rein\u00adforced even further with the recent signing of a joint \u201cMemo\u00adrandum of Under\u00adstan\u00adding\u201d between our two compa\u00adnies. Evatec\u2019s CLUS\u00adTER\u00adLINE\u00ae plat\u00adform provides a powerful foun\u00adda\u00adtion for deve\u00adlo\u00adping next-gene\u00adra\u00adtion thin-film processes and supporting indus\u00adtrial part\u00adners in acce\u00adle\u00adra\u00adting tech\u00adno\u00adlogy deve\u00adlop\u00adment and market adop\u00adtion\u201d.<\/p>\n

About SAL<\/span><\/strong><\/p>\n

Silicon Austria Labs propels ideas into inno\u00adva\u00adtion in the fields of micro\u00adsys\u00adtems, sensor systems, intel\u00adli\u00adgent wire\u00adless systems, power elec\u00adtro\u00adnics and embedded systems with a consis\u00adtent re\u00adsearch excel\u00adlence and economic impact.\u00a0<\/span><\/p>\n

About Evatec<\/span><\/strong><\/p>\n

As a global leader in thin film tech\u00adno\u00adlogy Evatec designs and manu\u00adfac\u00adtures produc\u00adtion systems for industry across appli\u00adca\u00adtions in Advanced Packa\u00adging, Semi\u00adcon\u00adductor, Opto\u00adelec\u00adtro\u00adnics and Photo\u00adnics, whilst it\u2019s cust\u00ado\u00admized engi\u00adnee\u00adring solu\u00adtions support the equip\u00adment needed at the worlds‘ leading R&D insti\u00adtu\u00adtions. For more infor\u00adma\u00adtion visit https:\/\/\u200bevatecnet.com<\/a>. For press enqui\u00adries please contact Allan Jaun\u00adzens. allan.jaun\u00adzens@evatecnet.com<\/a><\/span><\/p>\n

Inte\u00adrested in this topic?<\/span><\/h3>\n
\n

Get in touch<\/a><\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

Silicon Austria Labs (SAL) has expanded its advanced thin-film process\u00ading capa\u00adbi\u00adli\u00adties with the instal\u00adla\u00adtion of a second Evatec CLUS\u00adTER\u00adLINE\u00ae 200 thin-film cluster tool at its Villach faci\u00adlity. The new tool has been made possible through joint Euro\u00adpean funding with parti\u00adcular focus on deve\u00adlo\u00adping leading new indus\u00adtrial depo\u00adsi\u00adtion processes and film proper\u00adties for the high-perfor\u00admance metal […]<\/p>\n","protected":false},"author":5,"featured_media":6707,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-6703","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"acf":{"isevent":false,"location":"","eventdate":null,"eventtime":null},"_links":{"self":[{"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/posts\/6703","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/comments?post=6703"}],"version-history":[{"count":3,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/posts\/6703\/revisions"}],"predecessor-version":[{"id":6708,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/posts\/6703\/revisions\/6708"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/media\/6707"}],"wp:attachment":[{"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/media?parent=6703"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/categories?post=6703"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silicon-austria-labs.com\/en\/wp-json\/wp\/v2\/tags?post=6703"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}