Research and fabrication of novel AlN-based pseudo-binary alloys for high-frequency electronics.
VESPA
Partner Call open until: January 31, 2023
Start of the project: Q1 2023
The main challenges and topics of investigation are:
- Computer simulation of the suitable alloy combinations
- Alloying feasibility based on the alloy enthalpy as a function of the alloy composition studied via density functional theory
- Experimental realization of the simulated alloy compositions and their comprehensive characterization
Expected Results
- Discovery of the plethora new piezoelectric materials based on the AlN matrix
- Establishment of the production paths via magnetron sputtering
- Advanced characterization methods for novel thin films
- Production of capacitive structures for testing and reliability checks