Partner Call open until: January 31, 2023

Start of the project: Q1 2023


Research and fabrication of novel AlN-based pseudo-binary alloys for high-frequency electronics.

The main challenges and topics of investigation are:

  • Computer simulation of the suitable alloy combinations
  • Alloying feasibility based on the alloy enthalpy as a function of the alloy composition studied via density functional theory
  • Experimental realization of the simulated alloy compositions and their comprehensive characterization

Expected Results

  • Discovery of the plethora new piezoelectric materials based on the AlN matrix
  • Establishment of the production paths via magnetron sputtering
  • Advanced characterization methods for novel thin films
  • Production of capacitive structures for testing and reliability checks

Member Area