Piezo MEMS Micro-Mirror for Emerging Applications

Partner Call open until: August 1st, 2020

Start (of the project): September 2020


Fully autonomous vehicles are expected to hit the market in coming years, automotive manufacturers are developing more ADAS (Advanced Driver-Assistance Systems). The automotive industry will have to face many new challenges as: different uses of the roads, different human-vehicle interactions, new safety regulations according the JRC, the European Commission’s science and knowledge service. In this context we will study the emerging applications such as Smart Road Lighting Based on Distance Measurements and LIDAR systems.  The aim of the project is to provide next generation of vehicle lighting systems, integrating enhanced interaction with the environment

In the frame of this project, several lab demonstrators will be manufactured showing different use case applications of scanning micromirror-based lighting systems for the automotive industry. Implementation of the lighting device will be supported by SAL's extensive practical experience in the field.

Key objectives of this project are:

  • the design and modeling of next generation piezo micromirrors with associated optics
  • the improvement of high quality piezo thin films using CSD and sputtering
  • the microfabrication in the SAL cleanroom of optimized micromirrors showing potential ability to perform small volume production
  • the development of a wafer level packaging process integrating micro-optics and photonic components
  • the development of suitable optical characterization tools for manufactured devices
  • the development of integrated electronics for actuation, sensing and light source modulation.

The main challenges and topics of investigation are:

  • the development of reliable and performant piezo thin films in adequation with automotive standards
  • the modeling of a scanning micromirror structure and the development of photonic and optical components at the wafer scale fitting the automotive ecosystem
  • the study of different strategies to increase the FoV and the use of a smart projection schemes combined with advanced optical components to improve imaging quality while keeping a low power consumption
  • the use of sensor fusion and AI to project useful information around the vehicle

Expected results

  • Piezo MEMS micromirrors for automotive applications
  • High quality piezo thin films integrated on 8’’-wafers
  • Microfabrication processes for wafer level optic integration
  • Advanced co-design tools for piezoMEMS with associated optical system
  • New characterizations tools and techniques for MOEMS
  • At least 2 lab demonstrators showing 2 different use cases