Phased pMUT array for intravascular ultrasound imaging

Partner Call open until: May 10, 2021

Start (of the project): May 15, 2021


This project aims to develop a phased piezoelectric micromachined ultrasonic transducer (pMUT) array for intravascular ultrasound (IVUS) imaging applications. The pMUT based on MEMS technology is expected to have advantages over the traditional ultrasonic transducer in terms of form factor, system integration, product quality and cost. However, there are some limitations or drawbacks for a typical pMUT, such as very limited bandwidth and poor coupling coefficient. Efforts will be dedicated to overcoming the current limitations and fulfilling the requirements of IVUS imaging.

The main objectives include:

  • Design, microfabrication, and characterization of pMUT arrays for IVUS imaging.
  • Development of a proof-of-concept protype of IVUS imaging system in cooperation with the partners.

The key challenge include:

  • The bandwidth of a typical pMUT is too narrow to meet the requirement for IVUS imaging.
  • There is a trade-off between the form factor and acoustic performance.

The research topics include:

  • Design and optimization of pMUT cells and arrays.
  • Microfabrication and characterization of pMUT arrays.
  • System integration and testing of pMUT arrays.
  • Verification of the prototype IVUS system based on pMUT arrays.

Expected results

  • The fabricated pMUT array dies, test structures, and wafers.
  • The device specification, design diagrams, and microfabrication process flow.
  • Invention disclosures or patents and a lot of know-hows
  • Publications, conference abstracts or presentations