MICROFABRICATION

SEM / FIB Microscope

  • Manufacturer: Thermo Fisher
  • Model: Helios G4 UC

General Description:

The Helios G4 is a combined electron / focused ion beam microscope for topography and morphology analysis of micro- and nanostructures as well as the structuring of thereof. The system is equipped with a Bruker EDX detector, which allows to determine the composition of chemical elements in a sample.

 

Key Specifications:

  • Up to 200 mm wafers
  • High resolution SEM imaging
  • Electron column and Ion column (Ga-Ions) up to 30 kV
  • Ion beam patterning
  • Gas injection system for Pt deposition and insulator enhanced etch (XeF2)
  • SE detectors: ETD, TLD
  • BSE detectors: TLD, MD, ICD, ABS, CBS
  • EDX detector
  • Software: XT microscope, Maps plugin, Nanobuilder plugin

Availability

Use allowed for all researchers with permission

Location

Cleanroom C8
Europastraße 12
9524 Villach

Responsibles / Contact

Dr. Sarah Risquez / Dr. Ali Roshanghias
Tel.:+43 4242 56300 275
Tel.:+43 4242 56300 256