MICROFABRICATION

Plasma Cleaner

  • Manufacturer: Diener
  • Model: Nano 6

General Description:

The Diener Nano 6 can generate a low-pressure oxygen plasma which can be used for surface cleaning to remove organic residues of substrates or change of wettability and adhesion properties of polymers layers. An argon plasma can also be generated to remove persisting residues or other types of contaminants without surface modification.

 

Key Specifications:

  • Compatible with 8-inch wafers
  • O2-plasma
  • Ar-plasma
  • Power 0 – 400 W, Frequency 13.56 MHz
  • Pressure range 10-2 to 10 mbar

Availability

Use allowed for all researchers with permission

Location

Cleanroom C5
Europastraße 12
9524 Villach

Responsibles / Contact

Dr. Adrien Piot / Dr. Stefano Lumetti
Tel.:+43 4242 56300 264
Tel.:+43 4242 56300 225