Your contact person

Ing- Mag. Dr. Andreas Windisch

Senior Scientist Embedded AI

phone: +43 664 88157473

Your contact person

Dr. Michael Ortner

Senior Researcher Microsystem Technologies

phone: +43 (0)4242 56300 219

Your contact person

DI Dr. Mirjana Videnovic-Misic

Staff Scientist RF Architecture & Design

phone: +43 664 3547302

Science Talks

The SAL Science Talks are a hub for exchange on scientific topics. External prospective customers and SAL employees meet regularly and talk about the latest findings in their specialist areas. The access to the lectures is open - everyone is welcome!

Tailored electroplated copper layers for 300 mm power devices

Dr. Bernhard Lutzer
SAL Villach
High Tech Campus Villach
Europastraße 12
9524 Villach, Austria
Monday, 2019-10-07

Abstract: The formation of Cu layers with certain properties such as low internal stress, high hardness, a lowered coefficient of thermal expansion and a less self-anneal behaviour were the main objectives of this work. Detailed studies were performed to investigate the effect of the plating bath composition and the applied deposition parameters on the obtained Cu layer as well as to elucidate the mechanical and electrical properties of the so deposited layers. Additives addition and process parameters were tailored iteratively with the objective to reduce the grain size of the copper crystallites and therefore the internal stress, the layer resistivity, and to increase the hardness. The role played by the deposition parameters on the formed Cu layer properties were thereby systematically examined as mentioned before. This allowed connecting each of the electroplating parameters that were investigated with the respective Cu layers properties. The highlight was the successful up-scaling for a 12” wafer where a homogeneous copper layer could be deposited together with a small crystallite size before annealing (up to 5 nm) and after annealing (14 nm), which is a certain improvement compared to commercial electrolytes.


Neigh­borhood Disco­very in Low Power Mobile Ad-Hoc Sensor Networks

Philipp H. Kindt
JKU Linz
SCP1, MT327
Altenberger Straße 69
4040 Linz

Neigh­borhood Disco­very in Low Power Mobile Ad-Hoc Sensor Networks

Wire­less networks that operate without any fixed infra­struc­ture are rapidly growing in import­ance. Since all devices in such mobile ad-hoc networks (MANETs) run on batte­ries or rely on inter­mit­tently avail­able energy-harves­ting sources, the energy spent for commu­ni­ca­tion needs to be as low as possible. Typi­cally, MANET radios are duty-cycled and wake up only for short dura­tions of time for carrying out the necessary commu­ni­ca­tion and then go back to a sleep mode.

In the first part of his talk, Philipp Kindt will present two diffe­rent methods for incre­a­sing the energy effi­ci­ency in such networks. In the second part of this talk, he will present a para­me­triza­tion scheme, which helpts to realize the optimal rela­tions between energy consump­tion and disco­very laten­cies.